In this paper, the effect of substrate on the structural and optical properties of TiO2 thin film prepared by pulsed laser deposition technique employing a KrF laser source (λ=248 nm) has been studied. Structural properties have been studied using XRD and AFM and optical properties have been studied using
photoluminescence and transmission spectra. TiO2 thin film deposited on different substrates shows pure anatase phase structure with (004) and (101) plane. In PL spectra, emission peaks superimposed on the broad emission band has been observed. It has been concluded that ITO glass substrate is the best choice for ITO thin film among the substrates studied here.
Pulsed laser deposition, TiO2, Substrate effect