Zinc titanate (ZnTiO3) target was prepared by conventional solid state reaction method using ZnO and TiO2 in a molar ratio of 1:1. ZnTiO3 thin film have been deposited on ITO coated glass substrate using pulsed laser deposition (PLD) technique employing a KrF laser source (λ=248 nm). In present
work, the effect of substrate temperature on the structural, optical and dielectric properties of ZnTiO3 thin film has been studied. The XRD pattern revealed that pure hexagonal phase of ZnTiO3 appear upto 400oC and more increment in substrate temperature leads to transformation of hexagonal phase to cubic phase. We have observed the blue shift in absorption edge at lower temperature. When the substrate temperature increases from 300 to 400oC the band gap decreases due to strong hexagonal phase, but more increment in substrate temperature increases the band gap causes by change of phase from hexagonal to cubic. The dielectric constant of ZnTiO3 thin film increases as the substrate temperature increases due to the enhancement in crystallinity.
The improved film morphology by the increment in substrate temperature might also contribute to the enhancement of dielectric properties.